Implementing a FAIR-by-Design Approach for Process Management in Nanoscience Foundries

Starting from the foundational FAIR principles, the work addresses the challenges associated with standardizing process documentation in nanofabrication. A comprehensive hierarchical taxonomy was developed, combining international standards and community-defined terminologies to foster semantic clarity and interoperability across laboratories. Furthermore, an existing laboratory management system, CAMS, was adapted to produce FAIR-compliant data outputs through structured JSON reports, facilitating seamless integration with external repositories.